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College of Engineering

High-Tech Facility Research Center, NTU at Zhubei

Official Website

Principal Investigator : Luh-Maan CHANG

團隊人數 : 17

Study Field : Energy Savings, Carbon Dioxide Reduction, Circulate Economy of Fab Wastes, Eco-Environmental Protection, Smart Manufacturing, Big Data, Cloud Computing, Artificial Intelligence(AI)

Forms of Int'l Cooperation : Joint Research Project, Personnel Exchange, Student Exchange, Equipment Share, Seminar, Joint Patent Application, MOU/Collaborative Agreement

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Lab Introduction

High-Tech Industry is the industry applying advanced science technology to the fields of microelectronics, optoelectronics, precision instruments, electronic communications, nanotechnology, pharmaceutical preparation, microbiological research, medical equipment, animal experiments, aerospace technology, and other related industries. 

To sum up, the science and technology required in the high-tech industry is high-tech. Herein, semiconductor is the grains of high tech industry. It not only possesses versatile substance that has both electrical conductivity and insulating properties, but also contains the transistor ability of digitization. Thus, semiconductor lays down the foundation of all the high-tech.
                 
Semiconductor continuously brings forth improved technology, knowledge, economy, and quality of human life. It is well known, to fabricate semiconductor and to advance semiconductor technology, facility is a part of and prerequisite to semiconductor Manufacturing & R&D. 

In a semiconductor manufacturing plant (fabrication fab) high performance tools, extremely precise instruments, and ultrapure utilities such as air, water, electricity and chemicals are needed for semiconductor manufacturing & R&D, Moreover, these tools/instruments/utilities must be operated in stringently controlled cleanrooms, on stable platforms, and/or performed under an ambience with electromagnetic compatibility.

To continuously ensure the economic development advantages of high-tech semiconductor industries at Taiwan, and to upgrade civil engineering, the High-Tech Facility Research Center was established by Department of Civil Engineering, National Taiwan University in fall 2006. The mission of the Center is to enhance high-tech facility R&D, to foster talents and to provide industrial service. 

At the beginning, the Center focused on contamination control, electromagnetic mitigation, vibration elimination, construction and acceptance tests, and 3D facility information modeling and 4D (3D + Time) scheduling integration.

Current target issues include energy savings, carbon dioxide reduction, circulate economy of fab wastes, eco-environmental protection, smart manufacturing, big data, cloud computing, artificial intelligence(AI) for improving productivity, assuring the quality, safety, security and health of the facility, and enhancing the effective performance of environmental, social and governance (ESG) . 

International Cooperation Experience

  • Zeiss | United Kingdom
    Personnel Exchange Equipment Share

    2023/04/26 ~ 2023/04/26

  • BSI Group | United Kingdom
    Seminar

    2023/04/26 ~ 2023/04/26

  • The Asian Civil Engineering Coordinating Council (ACECC) | India
    Personnel Exchange Seminar

    2022/09/21 ~ 2022/09/23

  • Taiwan High-Tech Facility Association | Taiwan
    Personnel Exchange Seminar

    2022/09/15 ~ 2022/09/15

  • Nanyang Technological University | Singapore
    Personnel Exchange Seminar MOU / Collaborative Agreement

    2022/07/06 ~ 2022/07/06

  • The Department of Civil Engineering, Laman University | Malaysia
    Personnel Exchange Seminar MOU / Collaborative Agreement

    2022/07/05 ~ 2022/07/05

  • United Microelectronics Corp., UMC | Singapore
    Personnel Exchange MOU / Collaborative Agreement

    2022/07/02 ~ 2022/07/02

  • Schneider Electric | France
    Personnel Exchange

    2022/04/08 ~ 2022/04/08

  • The Asian Civil Engineering Coordinating Council (ACECC)
    Personnel Exchange Seminar MOU / Collaborative Agreement

    2022/03/29 ~ 2022/03/29

  • The Asian Civil Engineering Coordinating Council (ACECC)
    Personnel Exchange Seminar MOU / Collaborative Agreement

    2022/03/28 ~ 2022/03/28

  • Applied Materials Taiwan | United States of America
    Personnel Exchange

    2021/11/23 ~ 2021/11/23

  • The Asian Civil Engineering Coordinating Council (ACECC)
    Personnel Exchange Seminar MOU / Collaborative Agreement

    2021/09/24 ~ 2021/09/24

  • The Asian Civil Engineering Coordinating Council (ACECC) | Australia, Bangladesh, India, Indonesia, Japan, Mongolia, Myanmar, Nepal, New Zealand, Pakistan, South Korea, Taiwan, The Philippines, United States of America
    Personnel Exchange Seminar MOU / Collaborative Agreement

    2021/03/25 ~ 2021/03/27

  • | India
    Joint Research Project Personnel Exchange Seminar

    2021/01/26 ~ 2021/01/26

  • SEMICON Taiwan | Taiwan
    Personnel Exchange Seminar

    2020/09/19 ~ 2020/09/19

  • Purdue University | United States of America
    Personnel Exchange Seminar

    2020/04/10 ~ 2020/04/10

  • Schneider Electric | France
    Personnel Exchange

    2019/12/20 ~ 2019/12/20

  • Tsinghua University | Mainland China
    Seminar

    2019/12/16 ~ 2019/12/16

  • Korean Society of Civil Engineers | South Korea
    Personnel Exchange Seminar

    2019/10/17 ~ 2019/10/17

  • Hanyang University | South Korea
    Joint Research Project Personnel Exchange Seminar

    2019/10/15 ~ 2019/10/15

  • SEMICON Taiwan | Taiwan
    Personnel Exchange Seminar

    2019/09/19 ~ 2019/09/19

  • Fraunhofer Institute for Manufacturing Engineering and Automation IPA | Germany
    Personnel Exchange

    2019/08/06 ~ 2019/08/06

  • Purdue University | United States of America
    Joint Research Project Personnel Exchange Seminar

    2019/02/11 ~ 2019/02/11

  • Kyoto University | Japan
    Seminar

    2018/09/22 ~ 2018/09/22

  • SEMICON Taiwan | Taiwan
    Personnel Exchange Seminar

    2018/09/06 ~ 2018/09/06

  • SEMICON Taiwan | Taiwan
    Personnel Exchange Seminar

    2017/09/14 ~ 2017/09/14

  • University of Wisconsin | United States of America
    Joint Research Project Personnel Exchange Seminar

    2017/05/02 ~ 2017/05/02

  • Tsinghua University | Mainland China
    Personnel Exchange Seminar

    2017/04/22 ~ 2017/04/22

  • United Microelectronics Corp., UMC | Singapore
    Personnel Exchange

    2017/03/29 ~ 2017/03/29

  • Systems on Silicon Manufacturing Co., SSMC | Singapore
    Personnel Exchange

    2017/03/29 ~ 2017/03/29

  • Nanyang Technological University | Singapore
    Personnel Exchange Seminar

    2017/03/29 ~ 2017/03/29

  • Edwards Vacuum | United Kingdom
    Personnel Exchange

    2017/02/23 ~ 2017/02/23

  • Zeiss | United Kingdom
    Personnel Exchange

    2017/02/17 ~ 2017/02/17

Contact

Peggy HO

Position : Secretary

Email : peggyho@tl.ntu.edu.tw

Phone : +8863-6681274

Principal Investigator

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Luh-Maan CHANG

Position : Endowed Chair Professor of High-Tech Fab Engineering

Email : luhchang@ntu.edu.tw

Education / Background :

  • PhD, University of Texas at Austin, USA
  • M.S.Arch.E., The University of Texas at Austin, USA
  • B.S.C.E., National Cheng Kung University, Taiwan
     

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