Lab Introduction

Under the rapid development of the high-tech industry, fields such as precision machinery, micro-electromechanical systems, and today's flourishing electronics industry, IC manufacturing, advanced semiconductor packaging, and testing all highlight the importance of precision positioning systems, precision measurement and metrology. This laboratory focuses on precision measurement technology, developing various optical measurement and optomechatronic integration technologies. The optical aspects include innovative AI-driven automation, novel optical design, advanced 3D scanning, confocal microscopy, interferometry, optical scattering techniques, optical critical dimension (OCD) metrology, and X-ray scatterometry. The mechatronic aspects cover mechanical design, electronic circuit knowledge, and software programming.

The research emphasis of this laboratory lies in breakthroughs in innovative AOI (automated optical inspection) optomechatronic key technologies and system modules. The scope includes the innovative design and system integration of precision measurement systems, the development of intelligent key algorithms, the development of nano-level precision measurement key technologies and platforms adhering to Abbe's principle, the development of innovative intelligent AOI measurement systems, and the development of online inspection technologies and equipment for advanced semiconductor processes, all aimed at assisting the high-tech industry in pioneering critical inspection and measurement technologies.